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Vertical and Horizontal Furnance Tubes – ALTAY QUARTZ
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Vertical and Horizontal Diffusion Furnace Tubes

Product features

Includes the ATM process tubes, liners, caps and pedestals, inner and outer CVD tubes, nozzles, exhaust tubes, dust covers, quartz pins, shutter plates, wafer carriers, plate holders, and external torches

Usage areas

  • Semiconductor
  • Solar

Other related industries

  • Fiber Optic
  • Lamp Manufacturers
  • Chemical
  • Environmental Testing
  • Water Purification
  • Compound Semiconductor
  • Aerospace
  • Laser Technology
  • Infrared Heating
  • Ultraviolet

200mm
Vertical Furnace
Pyro Tube

Manufactured with
Atmospheric Process

  • Wet or dry oxidation
  • Thick oxide (1 Sum)
  • Well drive-in
  • H2, N2 annealing
  • POCL3 doping
  • BBr3, B2H6 doping

300mm
Vertical Diffusion
CVD Tube

Manufactured with
CVD Process

  • Poly Si
  • D-Poly Si
  • Nitride: Si3N4
  • Low stress Nitride (250MPa)
  • Super Low stress Nitride (250MPa)
  • Oxide - LTO, MTO, HTO, TEOS
  • Thick oxide: TEOD (2um up)
Contact for pricing